Interferometer with two-frequency phase modulation

Ilya Sh. Etsin; Michael G. Arkipov; Alexander G. Seregin

doi:10.1117/12.195950

12 December 1994 Interferometer with two-frequency phase modulation

Ilya Sh. Etsin, Michael G. Arkipov, Alexander G. Seregin

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195950
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

The interference method of two-frequency phase modulation has been investigated both theoretically and experimentally as applied to displacement measurement and wavefront testing. Analysis of errors caused by shot noise, piezoceramic modulator hysteresis, modulating oscillations phase shift and their amplitudes deviations has been carried out. It is shown that phase measurement error of 2(pi) /180 can be obtained at real conditions.

Citation Download Citation

Ilya Sh. Etsin, Michael G. Arkipov, and Alexander G. Seregin "Interferometer with two-frequency phase modulation", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195950

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