Optical performance of Mo/Si multilayer coated lamellar phase grating in soft x-ray domain

Lixiang Yuan; Zhengxiu Fan; Kui Yi; Gongjie Yin; Jian-Da Shao; Mingqi Cui; Xiaoliang Shen

doi:10.1117/12.190754

26 October 1994 Optical performance of Mo/Si multilayer coated lamellar phase grating in soft x-ray domain

Lixiang Yuan, Zhengxiu Fan, Kui Yi, Gongjie Yin, Jian-Da Shao, Mingqi Cui, Xiaoliang Shen

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190754
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

The fabrication and characterization of soft X-ray multilayer lamellar phase gratings are given simply in this paper. The measurement of optical performance of soft X-ray multilayer phase grating at Beijing Synchrotron Radiation Facility is described in detail. The measurement results are analyzed and also compared with the theory predication.

Citation Download Citation

Lixiang Yuan, Zhengxiu Fan, Kui Yi, Gongjie Yin, Jian-Da Shao, Mingqi Cui, and Xiaoliang Shen "Optical performance of Mo/Si multilayer coated lamellar phase grating in soft x-ray domain", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190754

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