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Annealing effects in short-period multilayers Cr3C2/C, TiC/C, Cr3C2/(B+C) and CrB2/C were studied in wide temperature range approximately equals 200-1200 degree(s)C by X-ray scattering and cross-sectional microscopy. It was shown that thermodynamic equilibrium of layers materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.
E. A. Bugaev,Anatoli I. Fedorenko,V. V. Kondratenko, andE. N. Zubarev
"Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200278
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E. A. Bugaev, Anatoli I. Fedorenko, V. V. Kondratenko, E. N. Zubarev, "Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge," Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200278