Paper
31 March 1995 Numerical simulation of shock waves in cavity of excimer laser
Shinichiroh Kosugi, Kazuo Maeno, Hiroki Honma
Author Affiliations +
Proceedings Volume 2502, Gas Flow and Chemical Lasers: Tenth International Symposium; (1995) https://doi.org/10.1117/12.204968
Event: Gas Flow and Chemical Lasers: Tenth International Symposium, 1994, Friedrichshafen, Germany
Abstract
To clarify the characteristics of the generation and propagation of shock waves generated by pulse discharges in an excimer laser, numerical simulation using a TVD scheme and a grid- distortion splitting method is carried out. The calculations are conducted in conditions corresponding to our visualization experiments and high-frequency operations. The propagation and attenuation of the shock waves in the high-frequency operation are visualized from the numerical results.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shinichiroh Kosugi, Kazuo Maeno, and Hiroki Honma "Numerical simulation of shock waves in cavity of excimer laser", Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995); https://doi.org/10.1117/12.204968
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KEYWORDS
Photography

Excimer lasers

Numerical simulations

Electrodes

Temperature metrology

Visualization

Wave propagation

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