Measurement of wavefront structure from large-aperture optical components by phase-shifting interferometry

C. Robert Wolfe; Janice K. Lawson; Marcia C. Kellam; Richard T. Maney; Anthony Demiris

doi:10.1117/12.218420

8 September 1995 Measurement of wavefront structure from large-aperture optical components by phase-shifting interferometry

C. Robert Wolfe, Janice K. Lawson, Marcia C. Kellam, Richard T. Maney, Anthony Demiris

Author Affiliations +

Proceedings Volume 2536, Optical Manufacturing and Testing; (1995) https://doi.org/10.1117/12.218420
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

This paper discusses the results of high spatial resolution measurement of the transmitted or reflected wavefront of optical components using phase shifting interferometry with a wavelength of 6328 angstrom. The optical components studied range in size from approximately 50 mm X 100 mm to 400 mm X 750 mm. Wavefront data, in the form of 3D phase maps, have been obtained for three regimes of scale length: 'micro roughness', 'mid-spatial scale', and 'optical figure/curvature'. Repetitive wavefront structure has been observed with scale lengths from 10 mm to 100 mm. The amplitude of this structure is typically 1/100 to 1/20. Previously unobserved structure has been detected in optical materials and on the surfaces of components. We are using this data to assist in optimizing laser system design, to qualify optical components and fabrication processes under study in our component development program.

Citation Download Citation

C. Robert Wolfe, Janice K. Lawson, Marcia C. Kellam, Richard T. Maney, and Anthony Demiris "Measurement of wavefront structure from large-aperture optical components by phase-shifting interferometry", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); https://doi.org/10.1117/12.218420

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