Characterization of microvibrations by speckle interferometry

Roland Hoefling; Volkmar Liebig; Claus-Dieter Schmidt

doi:10.1117/12.212646

23 June 1995 Characterization of microvibrations by speckle interferometry

Roland Hoefling, Volkmar Liebig, Claus-Dieter Schmidt

Proceedings Volume 2545, Interferometry VII: Applications; (1995) https://doi.org/10.1117/12.212646
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Digital speckle pattern interferometry is used to investigate the vibration behavior of silicon micromembranes. Mode shapes have been mapped up to the 20th natural frequency for squared membranes with millimeter and submillimeter dimensions. Experimental results are found in very good agreement with analytical and finite element analyses. Assigning vibration modes to the series of natural frequencies measured allows to get information about Young's modulus or membrane thickness, respectively.

Citation Download Citation

Roland Hoefling, Volkmar Liebig, and Claus-Dieter Schmidt "Characterization of microvibrations by speckle interferometry", Proc. SPIE 2545, Interferometry VII: Applications, (23 June 1995); https://doi.org/10.1117/12.212646

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