High-quality surface measurements using the Gabor expansion

Michael Friedmann; Tuvia Kotzer; Joseph Shamir

doi:10.1117/12.235344

11 March 1996 High-quality surface measurements using the Gabor expansion

Michael Friedmann, Tuvia Kotzer, Joseph Shamir

Proceedings Volume 2651, Liquid Crystal Materials, Devices, and Applications IV; (1996) https://doi.org/10.1117/12.235344
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States

Abstract

This work describes a new optical inspection method, based on the investigation of the combined space-frequency representation of the scattered field. Samples of the sliding window spectrum are measured optically, and then are processed using modern signal processing techniques, like signal reconstruction from Gabor expansion coefficients using the Zak transform, and phase recovery from amplitude only data, using projection onto constraints set algorithm. Computer simulations and experimental results show that the new method is capable to describe accurately very shallow phase objects, even when their dimensions are smaller than the diffraction limit of the optical setup.

Citation Download Citation

Michael Friedmann, Tuvia Kotzer, and Joseph Shamir "High-quality surface measurements using the Gabor expansion", Proc. SPIE 2651, Liquid Crystal Materials, Devices, and Applications IV, (11 March 1996); https://doi.org/10.1117/12.235344

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