SiO2 protective coatings on plastic optics deposited with plasma IAD

Ulrike Schulz; Stefan Jakobs; Norbert Kaiser

doi:10.1117/12.246810

19 August 1996 SiO₂ protective coatings on plastic optics deposited with plasma IAD

Ulrike Schulz, Stefan Jakobs, Norbert Kaiser

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246810
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Plasma ion assisted deposition was used to deposit SiO₂ coatings on polycarbonate and on silicon. To study the influence of ion bombardment during the deposition process the bias voltage as an equivalent for ion energy was varied. At a definite bias value surface microtopography is changed abruptly. Coatings deposited at higher bias voltages show a stable chemical composition and therefore constant optical properties can be expected. It was also found that the barrier effect of coatings against moisture uptake, measured for polycarbonate substrates, increases with bias voltage.

Citation Download Citation

Ulrike Schulz, Stefan Jakobs, and Norbert Kaiser "SiO₂ protective coatings on plastic optics deposited with plasma IAD", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246810

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