Electrical noise in MIM structures

Ivan Ostadal; Libor Lecko

doi:10.1117/12.238129

8 April 1996 Electrical noise in MIM structures

Ivan Ostadal, Libor Lecko

Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238129
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland

Abstract

Sandwich MIM structures Al/Al₂O₃/Au were measured before and after electroforming. I-V characteristics and noise of leakage and emission currents were measured in vacuum at various temperatures. Calculated power spectra of current noise of white, Lorentzian and 1/f^a type reflect relaxation processes and dominating conduction mechanisms at various applied voltages.

Citation Download Citation

Ivan Ostadal and Libor Lecko "Electrical noise in MIM structures", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238129

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