Piezoelectric microsensors based on thin ferroelectric films

Zygmunt Surowiak; Dionizy Czekaj; A. A. Bakirov; Vladimir P. Dudkevich

doi:10.1117/12.238167

8 April 1996 Piezoelectric microsensors based on thin ferroelectric films

Zygmunt Surowiak, Dionizy Czekaj, A. A. Bakirov, Vladimir P. Dudkevich

Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238167
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland

Abstract

On the basis of the thin films of BaTiO₃ and LiNbO₃ the piezoelectric isotropic and anisotropic sensors of dynamical deformation (SDD) have been constructed and investigated. It has been ascertained that the electrical signal of isotropic SDD is proportional to the sum of the main components of the relative deformation tensor of the surface of the sample whereas the anisotropic sensor signal depends on the angle (phi) between the sensor axis and the main axis of the deformation tensor of the sample. The stability of their parameters has been ascertained under repeated deformation of the sample surface and repeated heating/cooling.

Citation Download Citation

Zygmunt Surowiak, Dionizy Czekaj, A. A. Bakirov, and Vladimir P. Dudkevich "Piezoelectric microsensors based on thin ferroelectric films", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238167

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