Plasma polymer films for surface modification

Hynek Biederman; Pavel Hlidek; Jan Jezek; Danka Slavinska; Joseph Zemek

doi:10.1117/12.238169

8 April 1996 Plasma polymer films for surface modification

Hynek Biederman, Pavel Hlidek, Jan Jezek, Danka Slavinska, Joseph Zemek

Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238169
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland

Abstract

Plasma polymers were deposited on various surfaces using Ar/n-hexane/water working gas mixture. In most cases a test surface consisting from glass substrate coated by plasma polymer of Ar/n-hexane was used. It has been found that wettability of this test surface improves with the increased water concentration in a working gas mixture or with the increased power to the discharge. The increased concentration of polar groups was observed by FTIR absorption in the films stored in humid environment. Rate of the water absorption in dependence on power used for the film deposition is discussed.

Citation Download Citation

Hynek Biederman, Pavel Hlidek, Jan Jezek, Danka Slavinska, and Joseph Zemek "Plasma polymer films for surface modification", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238169

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