Preparation and properties of ferroelectric thin PZT films

Dionizy Czekaj; Zygmunt Surowiak; Vladimir P. Dudkevich; A. A. Bakirov

doi:10.1117/12.238159

8 April 1996 Preparation and properties of ferroelectric thin PZT films

Dionizy Czekaj, Zygmunt Surowiak, Vladimir P. Dudkevich, A. A. Bakirov

Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238159
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland

Abstract

By means of rf sputtering the ferroelectric thin film of PZT-type with the chemical constitution Pb(Zr_0.52Ti_0.46W_0.01Cd_0.01)O₃, thickness d_f equals (1 - 2.5) multiplied by 10^-6 m and polycrystalline structure was obtained. Either metallic foils or ceramics were used as substrates. In the case of thin film deposition on steel substrate and platinum at low temperatures (T_s less than 723 K) the nonferroelectric intermediate layer with the same chemical constitution but with the pyrochlore type structure has been created. Structural peculiarities are reflected in anomalous dielectric dependencies of the thin films. Obtained results are considered and discussed.

Citation Download Citation

Dionizy Czekaj, Zygmunt Surowiak, Vladimir P. Dudkevich, and A. A. Bakirov "Preparation and properties of ferroelectric thin PZT films", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238159

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