Application of micromachining technology to optical devices and systems

H. Fujita

doi:10.1117/12.250965

13 September 1996 Application of micromachining technology to optical devices and systems (Same as Vols. 2881 and 2882, p. 2)

H. Fujita

Author Affiliations +

Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250965
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Micromachine technologies based on IC-compatible micromachining have advantages denoted by three "M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems(MEMS) are reviewed.

Citation Download Citation

H. Fujita "Application of micromachining technology to optical devices and systems (Same as Vols. 2881 and 2882, p. 2)", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); https://doi.org/10.1117/12.250965

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