Digital interface to photomask vendors

Jane L. Wachinski; William R. Tennis

doi:10.1117/12.262836

27 December 1996 Digital interface to photomask vendors

Jane L. Wachinski, William R. Tennis

Proceedings Volume 2884, 16th Annual BACUS Symposium on Photomask Technology and Management; (1996) https://doi.org/10.1117/12.262836
Event: 16th Annual BACUS Symposium on Photomask Technology and Management, 1996, Redwood City, CA, United States

Abstract

Lucent Technologies (formerly AT&T) Microelectronics completed transition of their mask manufacturing to external vendors 1Q96. Maintaining a digital interface of all mask data and ordering information was critical to optimize the front end handshake with our vendors and to provide continuing support to our wafer fabrication lines. The goals that were set and achieved by using a totally digital interface are: reduced critical path vendor customer service and front end time; clarification and accuracy in meeting requirements; and ISO 9002 compliance, traceability and repeatability.

Citation Download Citation

Jane L. Wachinski and William R. Tennis "Digital interface to photomask vendors", Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); https://doi.org/10.1117/12.262836

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