Paper
24 September 1996 Micromechanical silicon-structure-based optical fiber vibration sensor for electric generator
Dong Zhou, Pei-De Lou, Kun Qiu, Minguang Tang, Fang He, Bo Zhou
Author Affiliations +
Proceedings Volume 2895, Fiber Optic Sensors V; (1996) https://doi.org/10.1117/12.252187
Event: Photonics China '96, 1996, Beijing, China
Abstract
A kind of optical fiber sensor mainly used for the terminal winding vibration monitoring in electric generator is discussed. Within this sensor, the light from a LED passes through an optical fiber; the fiber end is mounted on a reflecting cantilever beam, which is sensitive to the vibration of the detected object; the reflected light coupled back through the same fiber is modulated by the vibration and detected by a photodetector. With signal processing, the vibration acceleration, velocity and displacement can be obtained. The cantilever beam, which is the key component of the sensor, is a micromechanical silicon structure. The bandwidth of the sensor is 10 - 1000 Hz, resolution 0.1 m/s2, dynamic range 0 - 10 multiplied by 9.8 m/s2, weight 15 grams, fiber length 1000 m. The result of the experiment in a real electric generator is proposed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong Zhou, Pei-De Lou, Kun Qiu, Minguang Tang, Fang He, and Bo Zhou "Micromechanical silicon-structure-based optical fiber vibration sensor for electric generator", Proc. SPIE 2895, Fiber Optic Sensors V, (24 September 1996); https://doi.org/10.1117/12.252187
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KEYWORDS
Sensors

Silicon

Optical fibers

Fiber optics sensors

Structured optical fibers

Signal processing

Electro optical systems

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