Application of PZT thin films in microelectromechanical systems

Dennis L. Polla

doi:10.1117/12.276603

19 June 1997 Application of PZT thin films in microelectromechanical systems

Dennis L. Polla

Proceedings Volume 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.276603
Event: Smart Structures and Materials '97, 1997, San Diego, CA, United States

Abstract

Piezoelectric thin films have been integrated with silicon microfabrication methods in the formation of both sensors and actuators (commonly called MEMS). This work describes several applications of merged PZT thin film technology, solid-state micromachining, and silicon-based integrated circuit fabrication methods in the formation of acoustic emission microsensors, cantilever microbeam accelerometers, diaphragm micropumps, and cantilever microvalves. When combined with CMOS-based integrated circuits, these sensors and actuators form smart microelectromechanical systems with potentially low-cost and high performance.

Citation Download Citation

Dennis L. Polla "Application of PZT thin films in microelectromechanical systems", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); https://doi.org/10.1117/12.276603

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