Deposition of diamond-like carbon films using XeCl-excimer laser

Mao-Kuo Wei; Robert Queitsch; Adolf Lang; Karsten Schutte; Hans Wilhelm Bergmann

doi:10.1117/12.270111

4 April 1997 Deposition of diamondlike carbon films using XeCl excimer laser

Mao-Kuo Wei, Robert Queitsch, Adolf Lang, Karsten Schutte, Hans Wilhelm Bergmann

Proceedings Volume 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1997) https://doi.org/10.1117/12.270111
Event: XI International Symposium on Gas Flow and Chemical Lasers and High Power Laser Conference, 1996, Edinburgh, United Kingdom

Abstract

Diamond-like carbon (DLC) films were deposited using the laser-assisted physical vapor deposition (LPVD) method. This work is dedicated to an XeCl-excimer laser PVD procedure. The influences of the power density, working distance, and substrate temperature on the DLC-deposition are discussed. The propagation velocity of the laser ignited plasma was determined using short-time photography and time-of-flight (TOF) method.

Citation Download Citation

Mao-Kuo Wei, Robert Queitsch, Adolf Lang, Karsten Schutte, and Hans Wilhelm Bergmann "Deposition of diamondlike carbon films using XeCl excimer laser", Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); https://doi.org/10.1117/12.270111

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