Single-photon avalanche detectors for low-light-level imaging

Alan P. Morrison; Vasileios S. Sinnis; Alan Mathewson; Franco Zappa; Laura Varisco; Massimo Ghioni; Sergio D. Cova

doi:10.1117/12.278896

15 October 1997 Single-photon avalanche detectors for low-light-level imaging

Alan P. Morrison, Vasileios S. Sinnis, Alan Mathewson, Franco Zappa, Laura Varisco, Massimo Ghioni, Sergio D. Cova

Proceedings Volume 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII; (1997) https://doi.org/10.1117/12.278896
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Linear arrays of single photon avalanche detectors (SPADs) designed for use in low light level imaging applications were fabricated using a novel planar process that is compatible with standard CMOS technology. The device characteristics for these arrays are presented here to investigate their suitability for high efficiency low light level imaging. A new scheme is proposed to eliminate the problem of optical crosstalk between pixels in the array by introducing a trench isolation process coupled with silicon-on-insulator (SOI) technology.

Citation Download Citation

Alan P. Morrison, Vasileios S. Sinnis, Alan Mathewson, Franco Zappa, Laura Varisco, Massimo Ghioni, and Sergio D. Cova "Single-photon avalanche detectors for low-light-level imaging", Proc. SPIE 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, (15 October 1997); https://doi.org/10.1117/12.278896

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