Pulsed laser scanning deposition of diamondlike thin films

You-qing Wang; Qiulang Wang; Chengwu An; Biao Su

doi:10.1117/12.300671

20 February 1998 Pulsed laser scanning deposition of diamondlike thin films

You-qing Wang, Qiulang Wang, Chengwu An, Biao Su

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Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300671
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

Diamondlike thin films were prepared by irradiation of high purity graphite with a high power density( 1.178 x I 09 Watt I cm2 ) laser (XeCI 308 nm) in the vacuum ( I x 10-s Torr) . Raman spectra show the thin film with the properties of diamond, the scatter peak is in round 1330 cm-1 . The IR spectra show the thin film containing C-H bonds, and the ratio ofH to C is about 45%. The resistivity and optical energy gap of the thin film are 1.89 x 106 .0 .cm and 1.55 e. V, respectively. Keywords: Pulsed Laser deposition, Diamondlike thin film, Raman spectra.

Citation Download Citation

You-qing Wang, Qiulang Wang, Chengwu An, and Biao Su "Pulsed laser scanning deposition of diamondlike thin films", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300671

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