Force-balanced dual-axis microgyroscope

Seungdo An; Yong-Soo Oh; Byeungleul Lee; Kyu-Yeon Park; Youn-il Go; Jeong-gon Kim; Ci Moo Song; Seungseob Lee

doi:10.1117/12.293554

14 November 1997 Force-balanced dual-axis microgyroscope

Seungdo An, Yong-Soo Oh, Byeungleul Lee, Kyu-Yeon Park, Youn-il Go, Jeong-gon Kim, Ci Moo Song, Seungseob Lee

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293554
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

The surface micromachining process realized the dual-axis microgyroscope. The 7.5 micrometers -thick polysilicon layer deposited by LPCVD is used for the vibrating structure. In this research, we present a new structure with high angular inertia momentum and compact size. In particular, this structure can utilize a simple force-balancing torsional torque which does not need another top electrode layer to reduce the intrinsic non-linearity of a capacitive-type sensor. The gyroscope is tested in a high vacuum chamber for a high Q-factor. The sensing mode is separated 2 percent from the driving mode by applying the inter-plate DC tuning bias. The experiment resulted in a nose equivalent signal of 0.1 deg/sec.

Citation Download Citation

Seungdo An, Yong-Soo Oh, Byeungleul Lee, Kyu-Yeon Park, Youn-il Go, Jeong-gon Kim, Ci Moo Song, and Seungseob Lee "Force-balanced dual-axis microgyroscope", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293554

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