Yield optimization of multilayer optical coating by modeling of the monitoring process

G. L. Muscalu

doi:10.1117/12.312732

2 July 1998 Yield optimization of multilayer optical coating by modeling of the monitoring process

G. L. Muscalu

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312732
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

In this paper, one investigated the yield of some optical coatings with a nonquarterwave structure within the classical vacuum systems by modeling of the monitoring process. The correlation of the synthesis and modeling process, allows to set the optimum monitoring process for different types of coatings. The experimental results tested on antireflection coatings are according to the theoretical ones.

Citation Download Citation

G. L. Muscalu "Yield optimization of multilayer optical coating by modeling of the monitoring process", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312732

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