Status of x-ray mask development at the IBM Advanced Mask Facility

Kenneth C. Racette

doi:10.1117/12.328846

1 September 1998 Status of x-ray mask development at the IBM Advanced Mask Facility

Kenneth C. Racette

Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328846
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan

Abstract

IBM's Advanced Mask Facility in Essex Junction, Vermont, is responsible for the company's x-ray mask technology development and manufacturing. During the first half of 1997, this facility replaced the gold x-ray absorber with a refractory material in order to provide a greater compatibility between proximity x-ray masks and semiconductor manufacturing lines. Significant progress has been made to position x-ray masks are currently being delivered for advanced logic and memory applications. This paper discusses key process improvements such as the implementation of new deposition, annealing, etching and measurement equipment. Performance of critical parameters is presented, including the quality of substrates and absorber film stacks, image size and placement control, and defect density. The technology challenges and IBM's roadmap for application masks below 130nm are also provided.

Citation Download Citation

Kenneth C. Racette "Status of x-ray mask development at the IBM Advanced Mask Facility", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); https://doi.org/10.1117/12.328846

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available