Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment

Il'ya P. Agurok

doi:10.1117/12.332493

8 December 1998 Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment

Il'ya P. Agurok

Author Affiliations +

Proceedings Volume 3430, Novel Optical Systems and Large-Aperture Imaging; (1998) https://doi.org/10.1117/12.332493
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The double expansion of wavefront deformation in Zernike polynomials over the pupil and the field-of-view is a promising approach for lens design, testing, and alignment. Conventional wavefront representation in Zernike polynomial expansion from the pupil coordinates makes it very cumbersome to consider the optical system condition over the field-of- view. Evaluating the properties of symmetry of centered and perturbed systems can provide a compact representation of wavefront deformation over the field-of-view. Even for complicated optical systems such as lithography objectives, 8 to 12 global coefficients can provide a comprehensive system description. Coefficients for centered and perturbed systems are independent.

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Il'ya P. Agurok "Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment", Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); https://doi.org/10.1117/12.332493

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