Interferometric calibration of an integrating sphere for determination of the roughness correction of gauge blocks

Gerhard Boensch

doi:10.1117/12.323104

30 September 1998 Interferometric calibration of an integrating sphere for determination of the roughness correction of gauge blocks

Gerhard Boensch

Author Affiliations +

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323104
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Determination of the roughness correction with a scattering light method is preformed at PTB since more than forty years for measurements of gauge blocks by interferometry. Setting up of a new integrating sphere initiated investigations on calibration methods. The coupled interferometer method and the Newton's ring method are described and compared. For the coupled interferometer method, the gauge blocks are wrung to an optical flat and the phase of reflection for the gauge- flat interface is determined in a Twyman-Green interferometer. Satisfactory agreement is obtained for the result with both methods.

Citation Download Citation

Gerhard Boensch "Interferometric calibration of an integrating sphere for determination of the roughness correction of gauge blocks", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323104

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