Enhanced defect detection capability using combined brightfield/darkfield imaging

Mark M. Altamirano; Andrew Skumanich

doi:10.1117/12.324420

27 August 1998 Enhanced defect detection capability using combined brightfield/darkfield imaging

Mark M. Altamirano, Andrew Skumanich

Author Affiliations +

Proceedings Volume 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II; (1998) https://doi.org/10.1117/12.324420
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

Engineering analysis and in-line monitoring common employ either a brightfield TDI imaging or a laser-based darkfield optical approach to defect detection on patterned wafers. Brightfield imaging techniques are commonly used for engineering analysis because of their sensitivity and ability to capture pattern defects, especially in high contrast areas. Laser-based darkfield detection is used because of capture capability on rough deposited layers requiring a good signal to noise ratio. The WF-73X is a laser-based detection system that utilizes a combination of brightfield and darkfield optical configurations. The system offers 0.1 micrometers sensitivity for engineering analysis and 30+ wafer per hour throughput for line monitoring. It combines two propriety technologies employing a five PMT detector configuration.

Citation Download Citation

Mark M. Altamirano and Andrew Skumanich "Enhanced defect detection capability using combined brightfield/darkfield imaging", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324420

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE