Design and fabrication of 128x128 diffractive microlens arrays on Si for PtSi focal plane arrays

Yi Li; Xinjian Yi; Jianhua Hao

doi:10.1117/12.318063

11 August 1998 Design and fabrication of 128x128 diffractive microlens arrays on Si for PtSi focal plane arrays

Yi Li, Xinjian Yi, Jianhua Hao

Proceedings Volume 3553, Detectors, Focal Plane Arrays, and Imaging Devices II; (1998) https://doi.org/10.1117/12.318063
Event: Photonics China '98, 1998, Beijing, China

Abstract

Diffractive microlens arrays have been designed to improve the performance of PtSi Schottky barrier IR image sensors. They have been fabricated on the surface of Si substrates by successive photolithography and Ar⁺ ion-beam-etching technique, which operate at (lambda) equals 4.0 micrometers with a lens diameter of 100 micrometers and the lens F number of 1.56. The practical processes and fabrication method are shown and discussed. The microanalysis and optical characteristics of the diffractive microlens arrays are also presented. The experimental and theoretical results are in good agreement.

Citation Download Citation

Yi Li, Xinjian Yi, and Jianhua Hao "Design and fabrication of 128x128 diffractive microlens arrays on Si for PtSi focal plane arrays", Proc. SPIE 3553, Detectors, Focal Plane Arrays, and Imaging Devices II, (11 August 1998); https://doi.org/10.1117/12.318063

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