Femtosecond UV-laser ablation of solid targets

Peter Simon

doi:10.1117/12.320988

19 August 1998 Femtosecond UV-laser ablation of solid targets

Peter Simon

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320988
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

Ablation of submicron structures on metals and semiconductors by short ultraviolet laser pulses (0.5 - 50 ps, 248 nm) is presented. Features like periodic line structures with a line-spacing below 400 nm, and holes with diameters well below 1 micrometers are produced on the sample surface by single laser shot exposure. The structures are projection printed by a Schwarzschild-objective (NA equals 0.4) in air environment. The dynamics of the surface modification has been studied using a pump-probe technique. The ablated grating structure is illuminated with a second, weak probe pulse (500 fs at 496 nm) whose diffracted light (0th, 1st, 2nd order signals) is recorded as a function of the delay between the two pulses. The results provide valuable time- resolved information about the change of the surface morphology.

Citation Download Citation

Peter Simon "Femtosecond UV-laser ablation of solid targets", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320988

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available