Instrumentation Of A Variable Angle Scatterometer (VAS)

Fred D. Orazio Jr.; W. Kent Stowell; Robert M. Silva

doi:10.1117/12.934147

5 April 1983 Instrumentation Of A Variable Angle Scatterometer (VAS)

Fred D. Orazio Jr., W. Kent Stowell, Robert M. Silva

Proceedings Volume 0362, Scattering in Optical Materials II; (1983) https://doi.org/10.1117/12.934147
Event: 26th Annual Technical Symposium, 1982, San Diego, United States

Abstract

The problem of light scatter from optical surfaces is amplified to a critical level for the optics used in the Ring Laser Gyro (RLG). This has led to the development of a scatterometer at the RLG Lab, Wright-Patterson AFB, which can detect low level light scatter from the high quality optics used in RLG's, without first overcoating with metals. A helium-neon laser is used to illuminate a 0.5 mm diameter spot on the surface of the test part. The incident angle can be varied from 0 to 90 degrees, and the test piece can be maneuvered with five degrees of freedom, four of which are computer controlled. Scatter measurements are made with a photomultiplier detection system which can easily measure down to 10 parts per billion per steradian. The computer can analyze and plot the results very quickly and accurately for further interpretation.

Citation Download Citation

Fred D. Orazio Jr., W. Kent Stowell, and Robert M. Silva "Instrumentation Of A Variable Angle Scatterometer (VAS)", Proc. SPIE 0362, Scattering in Optical Materials II, (5 April 1983); https://doi.org/10.1117/12.934147

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