PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrate that also have a significant role in the component assembly. The synthesized material has a negative tone property under UV-radiation and they can be patterned by a conventional UV- lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Juha T. Rantala, Pekka Ayras, Raviv Levy, Michael R. Descour, Seppo Honkanen, Nasser Peyghambarian, "Fabrication of hybrid sol-gel glass diffractive elements," Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); https://doi.org/10.1117/12.343732