Low-voltage vertical multilayer thin-film-edge FEA for field emitter displays

David S.Y. Hsu; Henry F. Gray

doi:10.1117/12.344639

12 April 1999 Low-voltage vertical multilayer thin-film-edge FEA for field emitter displays

David S.Y. Hsu, Henry F. Gray

Proceedings Volume 3636, Flat Panel Display Technology and Display Metrology; (1999) https://doi.org/10.1117/12.344639
Event: Electronic Imaging '99, 1999, San Jose, CA, United States

Abstract

A new field emitter array (FEA) electron source has been developed which includes a hollow cylindrical multi-layer thin-film-edge low work function emitter and a low capacitance horizontal extraction gate. The field emitter is made by sandwiching a low work function lithium thin film between two high work function noble metal thin films to create a lithium dispenser field emitter in each FEA cell. Our fabrication method, based on conformal chemical beam deposition, is self-aligned and consists of very few processing steps compared to conical or pyramidal FEAs. The structure is fundamentally tolerant to back ion-bombardment and insensitive to poisoning as determined by cycling the operating emitter from 10^-8 to 10^-6 Torr of room air for several hours with no significant change in emission current. Using an extraction voltage of 62 volts we measured 16 microamps from 1-3 FEA cells. No special activation is required either for initial turn-on or when taking the FEA out to air and back again to vacuum. We believe this new FEA should be scalable and inexpensive for manufacturing low-cost FEDs. The chemistry, fabrication, and emission characteristics will be discussed in this talk.

Citation Download Citation

David S.Y. Hsu and Henry F. Gray "Low-voltage vertical multilayer thin-film-edge FEA for field emitter displays", Proc. SPIE 3636, Flat Panel Display Technology and Display Metrology, (12 April 1999); https://doi.org/10.1117/12.344639

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available