Performance of titanium and amorphous germanium microbolometer infrared detectors

M. V. S. Ramakrishna; G. Karunasiri; U. Sridhar; G. Chen

doi:10.1117/12.347954

28 April 1999 Performance of titanium and amorphous germanium microbolometer infrared detectors

M. V. S. Ramakrishna, G. Karunasiri, U. Sridhar, G. Chen

Proceedings Volume 3666, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98; (1999) https://doi.org/10.1117/12.347954
Event: International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98, 1998, New Delhi, India

Abstract

There is a considerable interest in recent years on microbolometer infrared detectors, due to the possibility of operating them at room temperature and the compatibility with CMOS fabrication process. In this work, we have fabricated bolometers with Ti and a:Ge as the sensing elements using a CMOS compatible process. Noise measurements indicate that detectivity D* of over 1.5 X 10⁹ cmHz^-1/2W^-1 and 4 X 10⁹ cmHz^-1/2W^-1 at 30 Hz could be realized for a:Ge and Ti bolometers, respectively. With further improvements in design and processing, it is estimated that bolometer focal plane arrays (FPAs) with noise equivalent temperature difference (NETD) of less than 50 mK are realizable using the above materials.

Citation Download Citation

M. V. S. Ramakrishna, G. Karunasiri, U. Sridhar, and G. Chen "Performance of titanium and amorphous germanium microbolometer infrared detectors", Proc. SPIE 3666, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98, (28 April 1999); https://doi.org/10.1117/12.347954

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available