Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters

Alain Spisser; Philippe Regreny; Christian Seassal; Jean Louis Leclercq; Pierre Viktorovitch

doi:10.1117/12.341253

10 March 1999 Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters

Alain Spisser, Philippe Regreny, Christian Seassal, Jean Louis Leclercq, Pierre Viktorovitch

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341253
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

InP-based microstructuring optimization is presented in order to develop the fabrication of highly selective and widely tunable optical filter for WDM applications. Technological constraints such as etching selectivity, etching anisotropy, sticking phenomena and residual stress are listed and their respective practical solutions are demonstrated. Opto-electro-mechanical simulations combined with this technological 'know how' have yielded to the fabrication of 8 air gaps InP-based microstructures suitable for production of optical filter demonstrators.

Citation Download Citation

Alain Spisser, Philippe Regreny, Christian Seassal, Jean Louis Leclercq, and Pierre Viktorovitch "Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341253

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