Measurement of thicknesses and refractive indices by low-coherence confocal interferometric microscopy

Ichirou Yamaguchi; Takashi Fukano

doi:10.1117/12.346811

29 April 1999 Measurement of thicknesses and refractive indices by low-coherence confocal interferometric microscopy

Ichirou Yamaguchi, Takashi Fukano

Proceedings Volume 3729, Selected Papers from International Conference on Optics and Optoelectronics '98; (1999) https://doi.org/10.1117/12.346811
Event: Selected Papers from the International Conference on Optics and Optoelectronics, 1998, Dehradun, India

Abstract

In this paper we first survey non-contacting measurement of thickness and refractive index of transparent plates and films. Especially, the separation of these two quantities are focused on. Then we explain the principle and the apparatus for separate measurement of refractive index and geometrical thickness, which are also applicable to multiple layers. In addition, several application examples of this method are also presented.

Citation Download Citation

Ichirou Yamaguchi and Takashi Fukano "Measurement of thicknesses and refractive indices by low-coherence confocal interferometric microscopy", Proc. SPIE 3729, Selected Papers from International Conference on Optics and Optoelectronics '98, (29 April 1999); https://doi.org/10.1117/12.346811

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