Design of a compact 3D laser scanner

Mark Geusen Jr.; Willem D. van Amstel; Stefan M. B. Baumer; Jef L. Horijon

doi:10.1117/12.360015

27 August 1999 Design of a compact 3D laser scanner

Mark Geusen Jr., Willem D. van Amstel, Stefan M. B. Baumer, Jef L. Horijon

Proceedings Volume 3737, Design and Engineering of Optical Systems II; (1999) https://doi.org/10.1117/12.360015
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

A design study for a compact 3D scanner, called Coplan, is presented. The Coplan is intended to be used for high speed, in-line coplanarity and shape measurement of electronic components, like Ball Grid Arrays and Surface Mount Devices. The scanner should have a scan length of at least 2 inches and a resolution of 5 micrometers in all 3 dimensions. First an analysis of two different scan schemes is made: a so-called pre-objective scheme using an F-(theta) scan lens and a post- objective scheme using a so-called banana field flattener, consisting of a convex, cylindrical hyperbolic mirror and a concave, cylindrical parabolic mirror. Secondly, an analysis of height resolution requirements for triangulation and confocal depth sensing has been made. It is concluded that for both methods of depth sensing a synchronous scheme with a 50-60 degrees detection angle in cross scan direction is required. It is shown that a post-objective scheme consisting of a banana mirror system combined with triangulation height detection offers the best solution for the optical requirements.

Citation Download Citation

Mark Geusen Jr., Willem D. van Amstel, Stefan M. B. Baumer, and Jef L. Horijon "Design of a compact 3D laser scanner", Proc. SPIE 3737, Design and Engineering of Optical Systems II, (27 August 1999); https://doi.org/10.1117/12.360015

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