Improved phase unwrapping of a phase-shift interferometer using a precision XY-scanner

Sunglim Park; Dae gab Gweon; Kee S. Moon

doi:10.1117/12.347772

7 May 1999 Improved phase unwrapping of a phase-shift interferometer using a precision XY-scanner

Sunglim Park, Dae gab Gweon, Kee S. Moon

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347772
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

A phase shift interferometer with an improved phase unwrapping is presented. The nanometer resolution XY stage is integrated into the standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detector's sampling frequency is made high. This paper presents spatial sampling of CCD and two scanning algorithms, whose simulation and experiment results are also presented. The results show that the scanning algorithms make CCD detector's sampling frequency high, and phase unwrapping is improved also.

Citation Download Citation

Sunglim Park, Dae gab Gweon, and Kee S. Moon "Improved phase unwrapping of a phase-shift interferometer using a precision XY-scanner", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347772

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