Metrology of the mirrors at the Taiwan Light Source

Duan-Jen Wang; T. C. Tseng; Shean-Jen Chen; Shen-Yaw Perng; Chien-Kuang Kuan; S. H. Ho

doi:10.1117/12.370086

16 November 1999 Metrology of the mirrors at the Taiwan Light Source

Duan-Jen Wang, T. C. Tseng, Shean-Jen Chen, Shen-Yaw Perng, Chien-Kuang Kuan, S. H. Ho

Proceedings Volume 3773, X-Ray Optics Design, Performance, and Applications; (1999) https://doi.org/10.1117/12.370086
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A Long trace profiler II (LTP II) with a stationary optical head and a moving penta prism was set up in our new metrology laboratory. It is a clean room with plus or minus 0.1 degrees Celsius temperature control for the stable measurement of LTP II. Some tests on the stability and repeatability of the LTP II were performed. The long term drift is less than 1 (mu) rad in 15 hours. The repeatability in the forward and backward scan is about 0.2 (mu) rad. Mirrors with different kinds of bending mechanisms were evaluated by the LTP II, some comments on the mounting and bending of the mirrors are discussed.

Citation Download Citation

Duan-Jen Wang, T. C. Tseng, Shean-Jen Chen, Shen-Yaw Perng, Chien-Kuang Kuan, and S. H. Ho "Metrology of the mirrors at the Taiwan Light Source", Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, (16 November 1999); https://doi.org/10.1117/12.370086

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