Fast parallel acquisition electron energy analyzer

Christopher G. H. Walker; Andrew Walker; Ranjan Badheka; Sumio Kumashiro; Marcus Jacka; Mohamed El Gomati; Martin Prutton; Frank H. Read

doi:10.1117/12.370135

15 November 1999 Fast parallel acquisition electron energy analyzer

Christopher G. H. Walker, Andrew Walker, Ranjan Badheka, Sumio Kumashiro, Marcus Jacka, Mohamed El Gomati, Martin Prutton, Frank H. Read

Author Affiliations +

Proceedings Volume 3777, Charged Particle Optics IV; (1999) https://doi.org/10.1117/12.370135
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A new type of electrostatic electron energy analyzer is described that can acquire an electron energy spectrum in 'one shot.' It uses a hyperbolic field to focus electrons emitted from a solid in the energy range 50 eV to 2500 eV into a dispersive plane of about 50 mm length. An expression for the energy resolution is given and the effect of side and base plates on the behavior of the device is discussed. The main intended area of application for this type of analyzer is parallel data acquisition in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). The potential to acquire a spectrum is just a few seconds is possible with this device.

Citation Download Citation

Christopher G. H. Walker, Andrew Walker, Ranjan Badheka, Sumio Kumashiro, Marcus Jacka, Mohamed El Gomati, Martin Prutton, and Frank H. Read "Fast parallel acquisition electron energy analyzer", Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); https://doi.org/10.1117/12.370135

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