Simulation of multipole systems including primary and secondary aberration analysis

Haoning Liu

doi:10.1117/12.370119

15 November 1999 Simulation of multipole systems including primary and secondary aberration analysis

Haoning Liu

Proceedings Volume 3777, Charged Particle Optics IV; (1999) https://doi.org/10.1117/12.370119
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A software package has been developed for simulating and designing multipole systems containing electrostatic round lenses, electrostatic and magnetic quadrupole, hexapole and octopole lenses, and Wien filters. Using our SOFEM and 3D packages, the field functions and their derivatives of these optical elements can be computed very accurately. This new software, using those field functions as input, computes and plots paraxial rays, primary and secondary aberrations for the analyzed systems. Computing paraxial rays, primary geometrical aberrations, primary and secondary chromatic aberrations is based on the formulae presented by Smith; while a set of newly derived formulae is employed to evaluate the secondary geometrical aberrations. Three examples are presented to illustrate the functionality of this software package.

Citation Download Citation

Haoning Liu "Simulation of multipole systems including primary and secondary aberration analysis", Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); https://doi.org/10.1117/12.370119

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