Novel design concepts for UV laser beam shaping

Joerg Bernges; Lars Unnebrink; Thomas F. E. Henning; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.368201

5 October 1999 Novel design concepts for UV laser beam shaping

Joerg Bernges, Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 3779, Current Developments in Optical Design and Optical Engineering VIII; (1999) https://doi.org/10.1117/12.368201
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Recent developments in the field of high transmitting beam shaping optics for material processing are presented. Central parts of these optics are non-rotationally symmetric optical elements (NOEs). Advanced design principles for NOEs are presented. An optical setup containing a NOE and a system for the adaptation of the spatial coherence properties of excimer lasers to the processing requirements are presented together with beam diagnosis and material processing results. In comparison to results obtained earlier a largely increased beam shaping performance is demonstrated.

Citation Download Citation

Joerg Bernges, Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Novel design concepts for UV laser beam shaping", Proc. SPIE 3779, Current Developments in Optical Design and Optical Engineering VIII, (5 October 1999); https://doi.org/10.1117/12.368201

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available