Fabrication of Au/PZT/BIT/Si heterostructure by pulsed-laser deposition

Jun Yu; Xiaoming Dong; Wen-li Zhou; Yun-bo Wang; You-qing Wang; Yuankai Zheng; Hua Wang; Ji-fan Xie; Gang Liu

doi:10.1117/12.361192

8 September 1999 Fabrication of Au/PZT/BIT/Si heterostructure by pulsed-laser deposition

Jun Yu, Xiaoming Dong, Wen-li Zhou, Yun-bo Wang, You-qing Wang, Yuankai Zheng, Hua Wang, Ji-fan Xie, Gang Liu

Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361192
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China

Abstract

The MFS heterostructures with structure of Au/PZT/p-Si and Au/PZT/BIT/p-Si were fabricated using pulsed laser deposition technique. The PZT ferroelectric thin films were deposited directly on Si or with a BIT buffer layer. P-E hysteresis loop, capacitance-voltage characteristics and current-voltage characteristics of the heterostructures were measured respectively. The results are performed and discussed.

Citation Download Citation

Jun Yu, Xiaoming Dong, Wen-li Zhou, Yun-bo Wang, You-qing Wang, Yuankai Zheng, Hua Wang, Ji-fan Xie, and Gang Liu "Fabrication of Au/PZT/BIT/Si heterostructure by pulsed-laser deposition", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); https://doi.org/10.1117/12.361192

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