LIGA: metals, plastics, and ceramics

Jill M. Hruby; Stewart K. Griffiths; Linda A. Domeier; Alfredo M. Morales; Dale R. Boehme; Michelle A. Bankert; William D. Bonivert; John T. Hachman; Dawn M. Skala; Aili Ting

doi:10.1117/12.361216

30 August 1999 LIGA: metals, plastics, and ceramics

Jill M. Hruby, Stewart K. Griffiths, Linda A. Domeier, Alfredo M. Morales, Dale R. Boehme, Michelle A. Bankert, William D. Bonivert, John T. Hachman, Dawn M. Skala, Aili Ting

Author Affiliations +

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361216
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

LIGA, an acronym from the German words for Lithography, Electroforming, and Molding, is being evaluated worldwide as a method to produce microparts from engineering materials. Much of the work to date in LIGA has focused on producing metal microparts, with nickel as the most common material of choice. There is a growing interest in producing plastic parts replicated from LIGA metal masters due largely to microanalytical instrumentation and medical applications. These plastic replicates are generally made by either hot embossing or injection molding. Ceramic replication, of particular interest for high temperature applications or to produce piezoelectric or magnetic microparts, is also emerging as an area of interest. In this paper, a model of the LIGA exposure and development processes is presented along with the result of numerical optimization of mask design and process cost. The baseline processes for a cost- effective method to produce metal microparts are discussed, along with replication methods and result for plastics and ceramics.

Citation Download Citation

Jill M. Hruby, Stewart K. Griffiths, Linda A. Domeier, Alfredo M. Morales, Dale R. Boehme, Michelle A. Bankert, William D. Bonivert, John T. Hachman, Dawn M. Skala, and Aili Ting "LIGA: metals, plastics, and ceramics", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361216

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available