Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices

Jamey S. Pelt; M. E. Ramsey; R. Magana Jr.; E. Poindexter Jr.; Maarten P. de Boer; David A. LaVan; Michael T. Dugger; James H. Smith; Steven M. Durbin

doi:10.1117/12.361206

30 August 1999 Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices

Jamey S. Pelt, M. E. Ramsey, R. Magana Jr., E. Poindexter Jr., Maarten P. de Boer, David A. LaVan, Michael T. Dugger, James H. Smith, Steven M. Durbin

Author Affiliations +

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361206
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A wide variety of thin layer coatings have been reported for inhibiting the occurrence of post-release stiction in MEMS. Hydrophobic coatings such as self-assembled monolayers perform this function very well, but have a limited lifetime due to eventual generation of wear-induced damage. On the other hand, metallic oxides with superior wear resistance are hydrophilic in character, making them prone to stiction in humid environments. This paper describes the investigation of several dielectric materials as potential candidates for hydrophobic coatings with good wear resistant properties. Films were grown using a combination of vacuum deposition techniques, including enhanced variations of pulsed laser deposition. Contact angle and hardness measurements were performed on flat single crystal wafers for evaluation of film properties, and initial trials on a lateral friction test structure developed at Sandia National Laboratories were performed.

Citation Download Citation

Jamey S. Pelt, M. E. Ramsey, R. Magana Jr., E. Poindexter Jr., Maarten P. de Boer, David A. LaVan, Michael T. Dugger, James H. Smith, and Steven M. Durbin "Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361206

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available