Paper
19 August 1999 Characterizing the process of cast molding microfluidic systems
Yuh-Min Chiang, Mark Bachman, Charles Ye Chu, Guann-pyng Li
Author Affiliations +
Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359350
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
Cast molding is a simple, low cost microfabrication method which offers the potential to fabricate microstructures in a large variety of polymer materials. We discuss some characterizations of a cast molding technique which exploits the use of polydimethylsiloxane as a mold material. The suitability of this process for microfluidic systems with five different polymers was studied by observing the mold sticking properties, pattern transfer resolution, and effects on surface roughness and surface wettability. The process yielded excellent results for all polymers, suggesting the suitability of cast molding as a general purpose microfabrication technique for polymers. Surface wettability was modified for some polymers.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuh-Min Chiang, Mark Bachman, Charles Ye Chu, and Guann-pyng Li "Characterizing the process of cast molding microfluidic systems", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359350
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Cited by 8 scholarly publications.
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KEYWORDS
Silicon

Polymers

Microfluidics

Epoxies

Surface roughness

Microfabrication

Scanning electron microscopy

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