Paper
19 August 1999 Dehydrogenation of cyclohexane to benzene in microreactors
Francis Jones, Anand Kuppusamy, Ai-Ping Zheng
Author Affiliations +
Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359333
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
Microreactors consisting of channels etched into silicon are used to dehydrogenate cyclohexane to benzene. These reactors are fabricated by wet etching into silicon. The reactors contain a system of 10 channels 10 micrometers deep, 500 micrometers wide, and 50 mm long. The surface of the channels is sputtered with platinum to catalyze the gas-solid heterogeneous reaction. This endothermic reaction is heated and kept isothermal at 200 degree(s)C. The level of conversion is linked to the details of the geometry, pressure, and fluid flow regime. Experiments and simulations show that conversion is higher in the Knudsen regime due to a higher level of molecule-wall collisions.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francis Jones, Anand Kuppusamy, and Ai-Ping Zheng "Dehydrogenation of cyclohexane to benzene in microreactors", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359333
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Cited by 2 scholarly publications.
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KEYWORDS
Microfluidics

Silicon

Molecules

Platinum

Chemical reactions

Photoresist materials

Protactinium

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