Large-area multiplexed sensing using MEMS and fiber optics

Michael B. Miller; Richard L. Clark Jr.; Clifton R. Bell; Patrick M. Russler

doi:10.1117/12.388887

21 June 2000 Large-area multiplexed sensing using MEMS and fiber optics

Michael B. Miller, Richard L. Clark Jr., Clifton R. Bell, Patrick M. Russler

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388887
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

Micro-electro-mechanical (MEMS) technology offers the ability to implement local and independent sensing and actuation functions through the coordinated response of discrete micro-electro-mechanical 'basis function' elements. The small size of micromechanical components coupled with the ability to reduce costs using volume manufacturing techniques opens up significant potential not only in military applications such as flight and engine monitoring and control, but in autonomous vehicle control, smart munitions, airborne reconnaissance, LADAR, missile guidance, and even in intelligent transportation systems and automotive guidance applications. In this program, Luna Innovations is developing a flexible, programmable interface which can be integrated direction with different types of MEMS sensors, and then used to multiplex many sensors ona single optical fiber to provide a unique combination of functions that will allow larger quantities of sensory input with better resolution than ever before possible.

Citation Download Citation

Michael B. Miller, Richard L. Clark Jr., Clifton R. Bell, and Patrick M. Russler "Large-area multiplexed sensing using MEMS and fiber optics", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388887

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