Micromachined convective accelerometer and inclinometer

Lijie Li; Yongjun Yang; Tong Zhao; Yanjun Zhao; Chun-Guang Liang

doi:10.1117/12.388912

21 June 2000 Micromachined convective accelerometer and inclinometer

Lijie Li, Yongjun Yang, Tong Zhao, Yanjun Zhao, Chun-Guang Liang

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388912
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

The reports relates to a fluid based accelerometer and inclinometer and more particularly to a transducer which determines acceleration, inclination, position or velocity based on a temperature differential caused by the effect of acceleration on free or natural convection. This device includes a heater a d two temperature sensing elements mounted within a sealed enclosure containing a gas. The thermal sensors and temperature sensors were produced using a commercial CMOS process accelerometer based on above principle has been fabricated and tested.

Citation Download Citation

Lijie Li, Yongjun Yang, Tong Zhao, Yanjun Zhao, and Chun-Guang Liang "Micromachined convective accelerometer and inclinometer", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388912

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