Phase synchronization of micromirror arrays using elastic linkages

Peizen Chang; Chih-Wen Liu; Shyh-yung Pao; Jenn-Yi Chen

doi:10.1117/12.388910

21 June 2000 Phase synchronization of micromirror arrays using elastic linkages

Peizen Chang, Chih-Wen Liu, Shyh-yung Pao, Jenn-Yi Chen

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388910
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

This work analyzes to synchronize the phases of micromirror array and operate resonance frequency. The eigenvector, which synchronizes in-phase, can be found via a mass- damping-spring system. The device replaces conventional large area mirror, thus enhancing the working frequency and allowing micromirror arrays to reduce a smaller gap. The torsional micromirror array fabricates using three conventional masks based on bulk-micromachining technology. This work also describes the proposed design in detail. According to our result, the difference between the testing results and theoretical value is within 1 degree.

Citation Download Citation

Peizen Chang, Chih-Wen Liu, Shyh-yung Pao, and Jenn-Yi Chen "Phase synchronization of micromirror arrays using elastic linkages", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388910

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