Increasing the dynamic range of a micromechanical moving-plate capacitor

Jukka M. Kyynarainen; Aarne S. Oja; H. Seppa

doi:10.1117/12.382264

10 April 2000 Increasing the dynamic range of a micromechanical moving-plate capacitor

Jukka M. Kyynarainen, Aarne S. Oja, H. Seppa

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382264
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

The LC series resonant circuit can be used to obtain large electrostatic forces at relatively low AC voltages. This makes LC derive attractive for electrostatic actuation and force feedback. It can also be used for achieving large displacements of a micro mechanical plate capacitor either by sweeping the frequency or the amplitude of the driving AC voltage. In both cases relatively good linearity can be obtained. The minimum driving voltages and maximum driving speeds are discussed. It is found that the LCR drive can tolerate relatively large parasitic capacitances. measurement done on a dual capacitive acceleration sensor verify the calculated results. A drive AC voltage rms amplitude of 10 percent of the DC pull-in voltage deflected the moving plate by about 60 percent of the nominal gap, limited only be a mechanical stopper.

Citation Download Citation

Jukka M. Kyynarainen, Aarne S. Oja, and H. Seppa "Increasing the dynamic range of a micromechanical moving-plate capacitor", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382264

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