New ultrathin 3D integration technique: technological and thermal investigations

Stephane Pinel; Josiane Tasselli; Antoine Marty; Jean-Pierre Bailbe; Eric Beyne; Rita Van Hoof; Santiago Marco; Sergio Leseduarte; Olivier Vendier; Augustin Coello-Vera

doi:10.1117/12.382262

10 April 2000 New ultrathin 3D integration technique: technological and thermal investigations

Stephane Pinel, Josiane Tasselli, Antoine Marty, Jean-Pierre Bailbe, Eric Beyne, Rita Van Hoof, Santiago Marco, Sergio Leseduarte, Olivier Vendier, Augustin Coello-Vera

Author Affiliations +

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382262
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

A new vertical chip integration is proposed, based on the UTCS concept. It consists in stacking thinned chips on top of a silicon substrate. Lateral and vertical metal interconnections and the thinned chips are embedded in BCB layers. This wafer scale integration technique is presented. Thermal behavior of such stacked structure is also discussed.

Citation Download Citation

Stephane Pinel, Josiane Tasselli, Antoine Marty, Jean-Pierre Bailbe, Eric Beyne, Rita Van Hoof, Santiago Marco, Sergio Leseduarte, Olivier Vendier, and Augustin Coello-Vera "New ultrathin 3D integration technique: technological and thermal investigations", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382262

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available