Silicon micro-electro-mechanical systems for millimeter-wave applications

Katia M. Grenier; Patrick Pons; T. Parra; Robert Plana; Jacques Graffeuil

doi:10.1117/12.382269

10 April 2000 Silicon micro-electro-mechanical systems for millimeter-wave applications

Katia M. Grenier, Patrick Pons, T. Parra, Robert Plana, Jacques Graffeuil

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382269
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

A new fully silicon MEM technology and design methodology is introduced to realize millimeter-wave applications such as switches. It is based on two kinds of micro-machining techniques: a bulk micro-machines used to realize micro-wave circuits on a suspended membrane in order to decrease losses, and a surface micro-machining to make air-bridges actuable by electrostatic force. A MEM bridge electrical model has been investigated and implemented in the design of distributed switches.

Citation Download Citation

Katia M. Grenier, Patrick Pons, T. Parra, Robert Plana, and Jacques Graffeuil "Silicon micro-electro-mechanical systems for millimeter-wave applications", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382269

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